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Doping Engineering for Front-End Processing: Volume 1070

Name: Doping Engineering for Front-End Processing: Volume 1070
Brand: Cambridge University Press
SKU: 02439042
Price: 39.49 EUR
Availability: InStock
Author: B. J. Pawlak
ISBN: 9781107408548

Language

English

Book Paperback

Libristo code: 02439042

Publishers Cambridge University Press, June 2014

Materials scientists, silicon technologists and TCAD researchers come together in this book to share... Full description

Libristo code: 02439042

97 b

39.49 € VAT included

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Materials scientists, silicon technologists and TCAD researchers come together in this book to share experimental results and physical models, discuss achievements and challenges, and identify key issues for future research in this field. The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.