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Doping Engineering for Front-End Processing: Volume 1070
Language
English
English
Book
Hardback
Materials scientists, silicon technologists and TCAD researchers come together in this book to share...
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Libristo code: 02060462
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Materials scientists, silicon technologists and TCAD researchers come together in this book to share experimental results and physical models, discuss achievements and challenges, and identify key issues for future research in this field. The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.
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About the book
Full name
Doping Engineering for Front-End Processing: Volume 1070
Language
English
English
Binding
Book - Hardback
Date of issue
2008
Number of pages
319
EAN
9781605110400
ISBN
160511040X
Libristo code
02060462
Publishers
Materials Research Society
Weight
568
Dimensions
157 x 235 x 23
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