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Resonant MEMS
Language
English
English
E-book
Adobe ePub DRM
Part of the AMN book series, this book covers the principles, modeling and implementation as well as...
Full description
Libristo code: 41064016
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475 b
475 b
193.99
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Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.
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About the book
Full name
Resonant MEMS
Author
Oliver Brand, Isabelle Dufour, Stephen Heinrich, Fabien Josse, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata
Language
English
English
Binding
E-book - Adobe ePub DRM
Date of issue
2015
EAN
9783527676354
Libristo code
41064016
Publishers
Wiley-VCH
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