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Surfaces, Interfaces, and Thin Films for Microelectronics
Language
English
English
Book
Hardback
This book provides full coverage of surfaces, interfaces, and film fundamentals for microelectronics...
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Libristo code: 01388110
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This book provides full coverage of surfaces, interfaces, and film fundamentals for microelectronics, as well as the physics and chemistry of microelectronics processing. Based on a course taught by the author for over 25 years at the University of North Carolina, this bookoffers a unique and informative blend of fundamental science, processing, and applications. Exercises and a liberal addition of application examples are provided, along with extensive references to the primary literature to guide readers in understanding microelectronic materials as well as design new materials and applications.
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About the book
Full name
Surfaces, Interfaces, and Thin Films for Microelectronics
Author
Eugene A. Irene
Language
English
English
Binding
Book - Hardback
Date of issue
2008
Number of pages
536
EAN
9780470174470
ISBN
0470174471
Libristo code
01388110
Publishers
John Wiley & Sons Inc
Weight
872
Dimensions
160 x 241 x 31
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