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Spectroscopic Ellipsometry - Principles and Applications
Language
English
English
Book
Hardback
Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semicond...
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Libristo code: 04878436
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Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.
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About the book
Full name
Spectroscopic Ellipsometry - Principles and Applications
Author
Hiroyuki Fujiwara
Language
English
English
Binding
Book - Hardback
Date of issue
2007
Number of pages
392
EAN
9780470016084
ISBN
0470016086
Libristo code
04878436
Publishers
John Wiley & Sons Inc
Weight
762
Dimensions
157 x 235 x 26
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