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SIMOX
Language
English
English
Book
Hardback
SIMOX explores Separation-by-IMplanted-OXygen technology, a method of fabricating silicon-on-insulat...
Libristo code: 11556797
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SIMOX explores Separation-by-IMplanted-OXygen technology, a method of fabricating silicon-on-insulator structures and substrates by implanting high doses of oxygen and high temperature annealing. The content includes a
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About the book
Full name
SIMOX
Author
Maria ANC
Language
English
English
Binding
Book - Hardback
Date of issue
2004
Number of pages
159
EAN
9780863413346
ISBN
086341334X
Libristo code
11556797
Publishers
INSTITUTION OF ENGINEERING & T
Weight
472
Dimensions
253 x 194 x 13
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