Contact
How to shop
Delivery
Shopping guide
Silicon Semiconductor Technology
Processing and Integration of Microelectronic Devices
English
167 b
Delivery to Austria
30-day return policy
Customers also purchased
The book presents the basic steps and the technical implementation of individual processes for microelectronic circuit integration in silicon. Interaction and influences of e. g. oxidation, etching, doping and thermal processes for integrating CMOS- and Bipolar circuits are discussed in detail, beginning with the purification of silicon up to the encapsulated integrated circuit. It includes modern processes like atomic layer deposition and etching for nanoscale structures and compares improvements like silicide contacts, copper metallization, high-k dielectrics, and SOI and FINFET structures. All processes are presented looking from the process engineer's view.
About the book
English
Give this book today
It's easy
1 Add to cart and choose Deliver as present at the checkout 2 We'll send you a voucher 3 The book will arrive at the recipient's addressYou might also be interested in
/
Paperback
17.39
€
/
Paperback
17.29
€
Hi! I'm Libroamiko, your book advisor.
How can I help you?