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Run-to-Run Control in Semiconductor Manufacturing
Language
English
English
Book
Hardback
Offers analyses of run-to-run (R2R) control. Through manufacturing case studies, this book provides...
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Libristo code: 06720493
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Offers analyses of run-to-run (R2R) control. Through manufacturing case studies, this book provides justification for and demonstrates the benefits of run-to-run control, and offers the know-how and direction for incorporating R2R control into readers' manufacturing capabilities.
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About the book
Full name
Run-to-Run Control in Semiconductor Manufacturing
Author
Duane Boning
Language
English
English
Binding
Book - Hardback
Date of issue
2000
Number of pages
368
EAN
9780849311789
ISBN
9780849311789
Libristo code
06720493
Publishers
Taylor & Francis Inc
Weight
630
Dimensions
158 x 242 x 22
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