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Reduced Thermal Processing for ULSI
Language
English
English
Book
Paperback
Proceedings of a NATO ASI held in Boca Raton, Florida, June 20-July 1, 1988
Libristo code: 02179687
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132 b
132 b
53.79
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Proceedings of a NATO ASI held in Boca Raton, Florida, June 20-July 1, 1988
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About the book
Full name
Reduced Thermal Processing for ULSI
Author
R.A. Levy
Language
English
English
Binding
Book - Paperback
Date of issue
2011
Number of pages
450
EAN
9781461278573
ISBN
1461278570
Libristo code
02179687
Publishers
Springer-Verlag New York Inc.
Weight
781
Dimensions
170 x 244 x 25
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