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Process development for nanostructuring and 3D micro/nanointegration

Language EnglishEnglish
Book Paperback
Book Process development for nanostructuring and 3D micro/nanointegration Senn Tobias
Libristo code: 09187233
Publishers Sudwestdeutscher Verlag Fur Hochschulschriften AG, January 2015
Micro- and Nanostructures significantly influence the physical and chemical properties of surfaces.... Full description
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Micro- and Nanostructures significantly influence the physical and chemical properties of surfaces. Therefore, such structures can be used to functionalize surfaces and adjust the surface properties to the specific requirements of a certain application. A remaining challenge is the integration of functional structures into micro devices to achieve e.g. patterning in 3D, 3D surface structures and sidewall patterning. This work is focused on the development of processes to achieve both, the accurate replication of micro and nanostructures as well as the integration of functional surface structures into micro devices.

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About the book

Full name Process development for nanostructuring and 3D micro/nanointegration
Author Senn Tobias
Language English
Binding Book - Paperback
Date of issue 2015
Number of pages 180
EAN 9783838150284
ISBN 3838150287
Libristo code 09187233
Publishers Sudwestdeutscher Verlag Fur Hochschulschriften AG
Weight 272
Dimensions 152 x 229 x 10

Categories

Technology, Engineering, Agriculture > Technology: general issues > Engineering: general
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