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This book describes the latest optical sensors used to measure angle and displacement in precision n...
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Libristo code: 09113655
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This book describes the latest optical sensors used to measure angle and displacement in precision nanometrology, and presents scanning-type measuring systems for use in surface forms and stage motions. Coverage includes algorithms and experimental data.
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About the book
Full name
Precision Nanometrology
Author
Wei Gao
Language
English
English
Binding
Book - Paperback
Date of issue
2014
Number of pages
354
EAN
9781447157434
ISBN
9781447157434
Libristo code
09113655
Publishers
Springer London Ltd
Weight
569
Dimensions
155 x 20 x 19
Categories
Mathematics & Science
>
Physics
>
Materials / States of matter
>
Condensed matter physics (liquid state & solid state physics)
Technology, Engineering, Agriculture
>
Electronics & communications engineering
>
Electronics engineering
>
Automatic control engineering
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