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Optimal Synthesis Methods for MEMS

Name: Optimal Synthesis Methods for MEMS
Brand: Springer-Verlag New York Inc.
SKU: 02643520
Price: 160.89 EUR
Availability: InStock
Author: S.G.K. Ananthasuresh
ISBN: 9781461351016

S.G.K. Ananthasuresh

Language

English

Book Paperback

Libristo code: 02643520

Publishers Springer-Verlag New York Inc., September 2013

This book is a first ever collection of optimization-based synthesis methods for MEMS. Various chapt... Full description

Libristo code: 02643520

394 b

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This book is a first ever collection of optimization-based synthesis methods for MEMS. Various chapters written by leading researchers in the field cover a variety of MEMS devices and actuation principles including mechanical, electrostatic, electro-thermal, and piezoelectric. Process, mask, and system-level syntheses are also addressed. Sufficient background material, algorithms, and details of implementation of the optimization procedures are included to facilitate application to practical problems by MEMS engineers and researchers as well as students. This timely book underscores the importance of synthesis in designing MEMS efficiently and economically.