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Language
English
English
Book
Paperback
Helps readers gain knowledge of the basic equations and constants that drive optical lithography, le...
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Libristo code: 06360759
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259 b
259 b
105.89
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Helps readers gain knowledge of the basic equations and constants that drive optical lithography, learn the basics of exposure systems and image formation, and come away with an understanding of system components, processing, and optimization. This book is suitable for engineers, technology managers, and senior technicians.
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About the book
Full name
Optical Lithography
Author
Burn Jeng Lin
Language
English
English
Binding
Book - Paperback
Date of issue
2010
Number of pages
500
EAN
9780819475602
ISBN
9780819475602
Libristo code
06360759
Publishers
SPIE Press
Weight
1182
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