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Microelectromechanical Systems: Volume 1139

Name: Microelectromechanical Systems: Volume 1139
Brand: Materials Research Society
SKU: 02060477
Price: 146.19 EUR
Availability: InStock
Author: Srikar VengallatoreJörg BagdahnNorman F. Sheppard
ISBN: 9781605111117

Materials and Devices II

Srikar VengallatoreJörg BagdahnNorman F. Sheppard

JrS. Mark Spearing

Language

English

Book Hardback

Libristo code: 02060477

Publishers Materials Research Society, June 2009

Microelectromechanical systems (MEMS) have transitioned from a technology niche to a role of major i... Full description

Libristo code: 02060477

358 b

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Microelectromechanical systems (MEMS) have transitioned from a technology niche to a role of major industrial significance. The worldwide market for MEMS is now approximately $10 billion, and the total value of systems enabled by MEMS is several orders of magnitude higher than this figure. As the market has grown, the material and process sets have broadened and departed from their semiconductor roots. In addition to engineering materials, there is now great interest in integrating multifunctional nanomaterials, smart materials and biomaterials within MEMS/NEMS to enhance functionality, performance and reliability. The opportunities created by this integration have generated a vibrant research community working on new materials and processes. This book reflects the breadth of topics currently under investigation in the field. Novel materials and accompanying processes are discussed, as are more conventional materials and processes. Consistent themes are the need for accurate material property assessment at the relevant length scales and for suitable metrology tools to support the introduction of new materials.