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MEMS Vibratory Gyroscopes

Name: MEMS Vibratory Gyroscopes
Brand: Springer-Verlag New York Inc.
SKU: 01380778
Price: 163.19 EUR
Availability: InStock
Author: Cenk Acar
ISBN: 9780387095356

Structural Approaches to Improve Robustness

Cenk Acar

Andrei M. Shkel

Language

English

Book Hardback

Libristo code: 01380778

Publishers Springer-Verlag New York Inc., October 2008

MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational prin... Full description

Libristo code: 01380778

399 b

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MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.