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Materials Reliability in Microelectronics V: Volume 391

Name: Materials Reliability in Microelectronics V: Volume 391
Brand: Materials Research Society
SKU: 02060054
Price: 27.89 EUR
Availability: PreOrder
Author: William F. Filter
ISBN: 9781558992948

Language

English

Book Hardback

Libristo code: 02060054

Publishers Materials Research Society, October 1995

This long-standing proceedings series is highly regarded as a premier forum for the discussion of mi... Full description

Libristo code: 02060054

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This long-standing proceedings series is highly regarded as a premier forum for the discussion of microelectronics reliability issues. In this fifth book, emphasis is on the fundamental understanding of failure phenomena in thin-film materials. Special attention is given to electromigration and mechanical stress effects. The reliability of thin dielectrics and hot carrier degradation of transistors are also featured. Topics include: modeling and simulation of failure mechanisms; reliability issues for submicron IC technologies and packaging; stresses in thin films/lines; gate oxides; barrier layers; electromigration mechanisms; reliability issues for Cu metallizations; electromigration and microstructure; electromigration and stress voiding in circuit interconnects; and resistance measurements of electromigration damage.