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Materials and Processes for Submicron Technologies

Name: Materials and Processes for Submicron Technologies
Brand: Elsevier Science & Technology
SKU: 04490729
Price: 143.19 EUR
Availability: InStock
Author: J. M. Martinez-Duart
ISBN: 9780080436173

J. M. Martinez-Duart

R. Madar

R. a. Levy

Language

English

Book Hardback

Libristo code: 04490729

Publishers Elsevier Science & Technology, November 1999

The European Materials Society decided to hold a Symposium entitled Materials and Processes for Subm... Full description

Libristo code: 04490729

350 b

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The European Materials Society decided to hold a Symposium entitled Materials and Processes for Submicron Technologies in June 16-19, 1998, within the yearly E-MRS Spring Meeting in Strasbourg, France. The purpose of this meeting was to discuss the results of the advances in microelectronic devices directly relating to the reduction in size of features of the devices down to submicron size. When electronic materials are patterned to these small sizes, their physico-chemical properties show many aspects (interdiffusion, electromigration, etc.), many of these not well known yet. The articles presented in this volume, 28 in number, are representative of the 40 papers accepted for this particular E-MRS Meeting (Symposium N).