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Ion Sources

Name: Ion Sources
Brand: Springer, Berlin
SKU: 01566924
Price: 235.79 EUR
Availability: InStock
Author: hang Huashun
ISBN: 9783540657477

hang Huashun

Language

English

Book Hardback

Libristo code: 01566924

Publishers Springer, Berlin, November 1998

Ion implantation has become a basic technology in device manufacturing. For efficient use of this ac... Full description

Libristo code: 01566924

577 b

235.79 € VAT included

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Ion implantation has become a basic technology in device manufacturing. For efficient use of this accelerator-based technique the choice of appropriate ion sources is important. This book deals with the design and operation of ion sources. Additionally the physics of ion formation of the various elements with different charge states and charge neutralization are discussed. Ion selection and beam diagnostics are part of the book too. The presentation of the necessary equations and diagrams for the various parameters makes this book useful as a handbook for ion sources.