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Glow Discharge Processes - Sputtering and Plasma Etching

Language EnglishEnglish
Book Hardback
Book Glow Discharge Processes - Sputtering and Plasma Etching Brian Chapman
Libristo code: 04887388
Publishers John Wiley & Sons Inc
Develops detailed understanding of the deposition and etching of materials by sputtering discharge,... Full description
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Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.

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About the book

Full name Glow Discharge Processes - Sputtering and Plasma Etching
Author Brian Chapman
Language English
Binding Book - Hardback
Number of pages 432
EAN 9780471078289
ISBN 047107828X
Libristo code 04887388
Publishers John Wiley & Sons Inc
Weight 706
Dimensions 168 x 244 x 28

Categories

Mathematics & Science > Physics > Electricity, electromagnetism & magnetism
Technology, Engineering, Agriculture > Energy technology & engineering > Electrical engineering
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