Contact
How to shop
Delivery
Shopping guide
Global Modeling and Peripheral Plasma
An Improved Global Model for Electronegative Discharge and Ignition Conditions for Peripheral Plasma Connected to a Capacitive Discharge
English
152 b
Delivery to Austria
Up to 30 days for returns
Customers also purchased
/
Adobe ePub DRM
45.69
€
In the first part of this book, an improved volume-§averaged global model is developed for a cylindrical §electronegative plasma that is applicable over a wide §range of electron densities, electronegativities, and §pressures. It is applied to steady and pulsed-power §oxygen discharges. The model incorporates effective §volume and surface loss factors for ions and §electrons combining three EN discharge regimes §spanning the plasma parameters and gas pressures of §interest.§The second part explores both theoretically and §experimentally a capacitive discharge connected §through a dielectric or metal slot to a peripheral §grounded region, which is used in commercial dual §frequency capacitive discharges. Ignition of the §peripheral plasma produces effects that are §detrimental to processing performance. Discharge §models are developed for diffusion and plasma §maintenance in the slot, and plasma maintenance in §the periphery. The theoretical predictions of §ignition conditions are compared with experimental §results. Instabilities associated with the loss of §confinement are discovered, and a physical model is §proposed.
About the book
English
Give this book today
It's easy
1 Add to cart and choose Deliver as present at the checkout 2 We'll send you a voucher 3 The book will arrive at the recipient's addressYou might also be interested in
/
Paperback
18.09
€
/
Hardback
27.89
€
/
Paperback
7.99
€
Hi! I'm Libroamiko, your book advisor.
How can I help you?