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Guide to Hands-on MEMS Design and Prototyping

Language EnglishEnglish
Book Paperback
Book Guide to Hands-on MEMS Design and Prototyping Joel A. Kubby
Libristo code: 02052838
Publishers Cambridge University Press, August 2011
Whether you are a student taking an introductory MEMS course or a practising engineer who needs to g... Full description
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Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well as exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online.

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About the book

Full name Guide to Hands-on MEMS Design and Prototyping
Author Joel A. Kubby
Language English
Binding Book - Paperback
Date of issue 2011
Number of pages 178
EAN 9781107645790
ISBN 1107645794
Libristo code 02052838
Publishers Cambridge University Press
Weight 320
Dimensions 154 x 229 x 10

Categories

Technology, Engineering, Agriculture > Mechanical engineering & materials > Materials science > Engineering applications of electronic, magnetic, optical materials
Technology, Engineering, Agriculture > Electronics & communications engineering > Electronics engineering > Microwave technology
Technology, Engineering, Agriculture > Electronics & communications engineering > Communications engineering / telecommunications > WAP (wireless) technology
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